30 July 2001 Active microvibration control of precision manufacturing factories with smart structure using piezoelectric actuators
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Abstract
In order to achieve more perfect vibration-free environment in precision manufacturing facilities such as semiconductor manufacturing factories, and apply steel frame structures to semiconductor manufacturing factories of the next generation, a smart structure was tested for active microvibration control of a 2-story steel frame building model of a 5 X 3 X 4H m outer size and a 2,500 kg total weight which was excited by ambient ground vibration. In the structure, piezoelectric actuators attached to the columns and the beams were used for the microvibration control by bending moment control of them. The controller was designed using the H-infinity control theory. The tests showed that the smart structure could effectively reduce the 3D microvibration of the building model, and its applicability to floors and even entire buildings of semiconductor manufacturing factories having steel frame structures.
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Takafumi Fujita, Masahito Enomoto, Takeo Arikabe, Tomohiro Ogawa, Nobuyoshi Murai, Yoshiyuki Hashimoto, Hiroki Hamaguchi, Takashi Kitahara, "Active microvibration control of precision manufacturing factories with smart structure using piezoelectric actuators", Proc. SPIE 4330, Smart Structures and Materials 2001: Smart Systems for Bridges, Structures, and Highways, (30 July 2001); doi: 10.1117/12.434145; https://doi.org/10.1117/12.434145
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KEYWORDS
Actuators

Control systems

Semiconductor manufacturing

Smart structures

Manufacturing

3D modeling

Systems modeling

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