16 August 2001 Development of active PBG structures for realizing novel MOEMS based on transparent metals
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Abstract
This work deals with the development of a novel class of smart opto-electro-mechanical devices that are based on Photonic Band Gap materials consisting of several periods of suitable metal-dielectric couples. Innovative devices with electrically controllable optical properties are obtained that can be used both as sensors with optical output signals for application in hostile environments and as controlled optical filters. Theoretical models of such novel devices together with experimental prototypes have been developed and characterization of the devices has been performed. Finally an integrated device, realized by using standard CMOS technologies and compatible micromachining processes, in being developed.
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Salvatore Baglio, Salvatore Baglio, Mark J. Bloemer, Mark J. Bloemer, Nicolo Savalli, Nicolo Savalli, Michael Scalora, Michael Scalora, } "Development of active PBG structures for realizing novel MOEMS based on transparent metals", Proc. SPIE 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS, (16 August 2001); doi: 10.1117/12.436616; https://doi.org/10.1117/12.436616
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