16 August 2001 Electromagnetic micro x-y stage with very thick Cu coil for probe-based mass data storage device
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Abstract
We fabricated electromagnetic micro x-y stage for application to probe based mass data storage (PDS) devices. The stage consists of Si body containing planar copper coils, glass substrate bonded to the body, and 8 permanent magnets. The dimensions of springs and copper coils were determined so that a current of 100 mA would provide 50 μm motion in x and y. For application to PDS device, electromagnetic stage should have a flat top surface and coils of low resistance. So conducting planar copper coils have been electroplated within silicon trench of high aspect ratio (5 μm in width and 30 μm in depth). As insulating layer, polyimide was used. Silicon flexures with the height of 250 μm were fabricated by using ICP-RIE (Inductively Coupled Plasma Reactive Ion Etching). The characteristics of the fabricated electromagnetic stage were measured by LDV (Laser Doppler Vibrometer) and DSA (Dynamic Signal Analyzer). DC gain was 0.16 μm/mA and the maximum displacement was 42 μm at a current of 180 mA. The natural frequency was 325 Hz.
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Jaejoon Choi, Jaejoon Choi, Hong sik Park, Hong sik Park, Kyu yong Kim, Kyu yong Kim, Jong up Jeon, Jong up Jeon, } "Electromagnetic micro x-y stage with very thick Cu coil for probe-based mass data storage device", Proc. SPIE 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS, (16 August 2001); doi: 10.1117/12.436622; https://doi.org/10.1117/12.436622
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