16 August 2001 Fabrication of microstructures and microdevices by the particle assemblage
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Abstract
We aim to fabricate microstructure and microdevices by integrating and arranging powder particles, i.e., the particle assemblage. We have developed three assembling techniques of the particles. The details of the assembling techniques and samples of the assembled microstructures are introduced. A manipulator is developed to manipulate and to weld metal particles by using a tungsten probe. Nickel alloy particles of 50 micrometers were piled on a gold substrate by the manipulator, and a leaning tower of the particles is fabricated. The array of the leaning tower is considered to act as an actuator. For the integration of a great number of particles, we developed another method based on the principle with the xerography. An electron beam or an ion beam is irradiated on an insulating substrate. An electrified pattern is formed on the substrate by the doped electron or doped ion. Fine particles are attracted to the pattern by the electrostatic force. Thus, we can arrange particles by immersing the substrate in the suspension of particles. The third is a productive method of ordered mixture by the electrostatic force. A self- thermostatic heater is made from the composite particles of BaTiO3 and In produced by the method.
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Mikihiko Kobayashi, Mikihiko Kobayashi, Norio Shinya, Norio Shinya, Takehiro Dan, Takehiro Dan, Hiroshi Fudouzi, Hiroshi Fudouzi, Takeshi Konno, Takeshi Konno, Mitsuru Egashira, Mitsuru Egashira, } "Fabrication of microstructures and microdevices by the particle assemblage", Proc. SPIE 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS, (16 August 2001); doi: 10.1117/12.436610; https://doi.org/10.1117/12.436610
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