16 August 2001 MEMS and nanotechnology research for the electronics industry
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The 20th Century has witnessed breathtaking developments in the miniaturization and the large-scale integration of microelectronic devices that have had an enormous impact on human affairs. The same miniaturization paradigm can be applied to mechanical devices using MEMS technology leading to ultra small micromachines that cannot otherwise be fabricated using conventional machining and assembly techniques. The MEMS technology is expected to have a great impact in the 21st century by enabling many complex electromechanical systems to be fabricated and integrated. In this paper, applications of MEMS to many areas relating to information and biotechnology are discussed. These topics are presented in the context of ongoing research at the Samsung Advanced Institute of Technology (SAIT). SAIT is the central research laboratory for the Samsung Corporation whose charter is to develop breakthrough technologies to be the leader in the 21st century.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Y. Eugene Pak, "MEMS and nanotechnology research for the electronics industry", Proc. SPIE 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS, (16 August 2001); doi: 10.1117/12.436598; https://doi.org/10.1117/12.436598


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