Micromachined gyroscopes: challenges, design solutions, and opportunities

Andrei M. Shkel

doi:10.1117/12.436629

16 August 2001 Micromachined gyroscopes: challenges, design solutions, and opportunities

Andrei M. Shkel

Proceedings Volume 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS; (2001) https://doi.org/10.1117/12.436629
Event: SPIE's 8th Annual International Symposium on Smart Structures and Materials, 2001, Newport Beach, CA, United States

Abstract

Micromachined gyroscopes are probably the most challenging type of transducers ever attempted to be designed in micro-world. A nail-size dynamic system integrated with control electronics on the same silicon chip is designed to be a very sensitive sensor which is potentially able to detect maneuvers and motions beyond human perception. Along with exciting opportunities which MEMS gyroscopes could bring to everyday life, the miniaturization introduces many new technical challenges. Multi-degree of freedom dynamics, sensitivity to fabrication imperfections, dynamic instability, limited control resources - all these raise a number of fundamentally challenging issues in the design, analysis, and control of micromachined gyroscopes. In this paper, we summarize principles of operation, review recent research and development efforts, and discuss potential applications and the future market of silicon based micromachined gyroscopes.

Citation Download Citation

Andrei M. Shkel "Micromachined gyroscopes: challenges, design solutions, and opportunities", Proc. SPIE 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS, (16 August 2001); https://doi.org/10.1117/12.436629

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available