16 August 2001 Micromachined systems for rf and microwave antenna applications
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Abstract
This paper provides a brief review of applications for MEMS based systems in microwave and millimeter wave systems. MEMS based switches, capacitors, inductors, phase shifters and micromachined transmission lines and antennas find increasing applications in recent years. Approaches towards the design and fabrication of two MEMS components such as phase shifters and switches, both making use of high dielectric barium strontium titanate (BST) thin films to improve the performance characteristics are also presented. Electrostatic micro switches made with this approach can be actuated with very low voltages.
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K. J. Vinoy, Pramod K Sharma, K. A. Jose, Vijay K. Varadan, Vasundara V. Varadan, "Micromachined systems for rf and microwave antenna applications", Proc. SPIE 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS, (16 August 2001); doi: 10.1117/12.436595; https://doi.org/10.1117/12.436595
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