24 July 2001 High-performance surface acoustic wave sensors for liquid environments
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Abstract
Acoustic wave devices based on waveguide modes with shear-horizontal polarisation, i. e. Love modes, are very promising for sensor application, especially in liquid environments. They can be used for determination of liquid density and viscosity as well as for chemical sensors. Up to now, several systems have been reported based on standard ST-quartz. Those devices lack temperature stability which is essential for field application. However, appropriate combinations of crystal cut angle and SiO2 overlay thickness should provide temperature compensation. Thus, different systems based on Y-rot quartz and lithium tantalate plates with SiO2 waveguiding films have been investigated. Temperature behavior as well as relevant acoustic properties are compiled. It has been proven that numerical calculations yield a very accurate description of the physical device properties. For both cases of material combinations it has been shown that systems are available combining temperature compensation with a high device sensitivity.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Manfred Weihnacht, Manfred Weihnacht, Falk Herrmann, Falk Herrmann, } "High-performance surface acoustic wave sensors for liquid environments", Proc. SPIE 4335, Advanced Nondestructive Evaluation for Structural and Biological Health Monitoring, (24 July 2001); doi: 10.1117/12.434183; https://doi.org/10.1117/12.434183
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