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28 November 2000 Development of 65 X 1 uncooled membrane-type microbolometer array
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Proceedings Volume 4340, 16th International Conference on Photoelectronics and Night Vision Devices; (2000) https://doi.org/10.1117/12.407759
Event: XVI International Conference on Photoelectronics and Night Vision Devices, 2000, Moscow, Russian Federation
Abstract
This paper presents the structure and technology of 65- elements linear array of membrane type microbolometers, and the research results of its properties. DC biased microbolometers with VOx thermosensitive layer have detectivity of 5x107 cm/Hz1/2W at 12.5 Hz at 12.5 Hz frequency, and response time of 3 ms. The ways of improvement of developed linear array sensitivity are planed.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. G. Malyarov, Igor A. Khrebtov, A. D. Smirnov, L. S. Raguzina, V. Yu. Zerov, Yu. V. Kulikov, and Igor I. Shaganov "Development of 65 X 1 uncooled membrane-type microbolometer array", Proc. SPIE 4340, 16th International Conference on Photoelectronics and Night Vision Devices, (28 November 2000); https://doi.org/10.1117/12.407759
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