Paper
10 January 2002 Electron beam mastering system for mass data storage
Giles Cartwright, Gerald Reynolds, Chris Bayliss, Adrian Pearce, Colin Dix, Nick Ogilvie
Author Affiliations +
Proceedings Volume 4342, Optical Data Storage 2001; (2002) https://doi.org/10.1117/12.453376
Event: Optical Data Storage, 2001, Santa Fe, NM, United States
Abstract
The development and operation of an Electron Beam Mastering System suitable for the production of high capacity optical discs of several hundred gigabytes per layer is discussed.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Giles Cartwright, Gerald Reynolds, Chris Bayliss, Adrian Pearce, Colin Dix, and Nick Ogilvie "Electron beam mastering system for mass data storage", Proc. SPIE 4342, Optical Data Storage 2001, (10 January 2002); https://doi.org/10.1117/12.453376
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Electron beams

Photoresist processing

Data storage

Optical discs

Control systems

Modulation

Process control

RELATED CONTENT

New RLL(1,k,4,6) modulations for optical recording
Proceedings of SPIE (January 10 2002)
Further advances in electron beam recording
Proceedings of SPIE (September 18 2000)
Research and implementation on RLL (2, 12; 8, 15) run...
Proceedings of SPIE (November 19 2008)
The study of CD error in mid local pattern area...
Proceedings of SPIE (October 30 2007)
Archival Optical Disk Data Storage
Proceedings of SPIE (September 10 1980)

Back to Top