20 August 2001 Advanced point diffraction interferometer for EUV aspherical mirrors
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Abstract
An advanced point diffraction interferometer for measuring EUV aspherical mirrors with high accuracy has been developed. It is designed for measuring various EUV mirrors with high accuracy and high precision. It can measure the surface figure of all mirrors that will be used in high numerical aperture systems. Using this interferometer, 0.1nm rms precision and 0.2nm rms accuracy are expected.
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Kazuya Ota, Kazuya Ota, Takahiro Yamamoto, Takahiro Yamamoto, Yusuke Fukuda, Yusuke Fukuda, Katsura Otaki, Katsura Otaki, Iwao Nishiyama, Iwao Nishiyama, Shinji Okazaki, Shinji Okazaki, "Advanced point diffraction interferometer for EUV aspherical mirrors", Proc. SPIE 4343, Emerging Lithographic Technologies V, (20 August 2001); doi: 10.1117/12.436686; https://doi.org/10.1117/12.436686
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