Theoretical calculations of photoabsorption of polymers in the EUV (extreme ultraviolet) region

Nobuyuki N. Matsuzawa; Shigeo Irie; Ei Yano; Shinji Okazaki; Akihiko Ishitani

doi:10.1117/12.436657

20 August 2001 Theoretical calculations of photoabsorption of polymers in the EUV (extreme ultraviolet) region

Nobuyuki N. Matsuzawa, Shigeo Irie, Ei Yano, Shinji Okazaki, Akihiko Ishitani

Proceedings Volume 4343, Emerging Lithographic Technologies V; (2001) https://doi.org/10.1117/12.436657
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

A theoretical comparison between the linear absorption coefficients at EUV wavelengths of 13 nm and 11 nm for more than 140 polymers revealed that the absorbance of organic polymers at 11 nm is ~30% lower than that at 13 nm. IN addition, the effects of oxygen content and density on the absorbance at 13 nm was theoretically investigated for organic polymers containing oxygen atoms. This investigation showed that, for organic polymers with about half the oxygen content of Novolak, the transmittance is 50% at a thickness of 200 nm and 60% at 140 nm. This further means that at 11 nm, the transmittance of the polymers should be 60% at 200 nm and 70% at 140 nm. These results suggest that a single-layer resist (SLR) process may very well be suitable for EUV resist processes. Further theoretical studies on silicon-containing polymers showed that, for a thickness of 200 nm and a wavelength of 13 nm, the transmittance would be in the range of 40-45% for silsequioxane polymers with some organic hydrocarbon parts, and in the range of 45-50% for siloxane polymers with some organic hydrocarbon parts.

Citation Download Citation

Nobuyuki N. Matsuzawa, Shigeo Irie, Ei Yano, Shinji Okazaki, and Akihiko Ishitani "Theoretical calculations of photoabsorption of polymers in the EUV (extreme ultraviolet) region", Proc. SPIE 4343, Emerging Lithographic Technologies V, (20 August 2001); https://doi.org/10.1117/12.436657

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available