Vibrational analysis of 200-mm EPL masks

Andrew R. Mikkelson; Cheng-Fu Chen; Roxann L. Engelstad; Edward G. Lovell

doi:10.1117/12.436698

20 August 2001 Vibrational analysis of 200-mm EPL masks

Andrew R. Mikkelson, Cheng-Fu Chen, Roxann L. Engelstad, Edward G. Lovell

Proceedings Volume 4343, Emerging Lithographic Technologies V; (2001) https://doi.org/10.1117/12.436698
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

The vibratory response of Electron-beam Projection Lithography (EPL) masks has been characterized for two applications: to support the processes for mask cleaning (e.g., PLASMAX) and to preclude resonance conditions during metrology and inspection. The analysis of a 200-mm SCALPEL mask has been completed using experimental and numerical procedures to determine the dynamic response; the procedures characterized transverse vibrations by identifying the natural frequencies with their respective mode shapes. For mask cleaning applications, dominant modes were superimposed to form a more uniform acceleration field within the grillage area for effective removal of contaminants. In order to assess potential resonance issues, a finite element model was used to simulate the four-pad support, which is currently proposed for the EPL mask standard chuck. The fundamental frequency of the mask in the four-pad support was over 300Hz.

Citation Download Citation

Andrew R. Mikkelson, Cheng-Fu Chen, Roxann L. Engelstad, and Edward G. Lovell "Vibrational analysis of 200-mm EPL masks", Proc. SPIE 4343, Emerging Lithographic Technologies V, (20 August 2001); https://doi.org/10.1117/12.436698

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