20 August 2001 Vibrational analysis of 200-mm EPL masks
Author Affiliations +
The vibratory response of Electron-beam Projection Lithography (EPL) masks has been characterized for two applications: to support the processes for mask cleaning (e.g., PLASMAX) and to preclude resonance conditions during metrology and inspection. The analysis of a 200-mm SCALPEL mask has been completed using experimental and numerical procedures to determine the dynamic response; the procedures characterized transverse vibrations by identifying the natural frequencies with their respective mode shapes. For mask cleaning applications, dominant modes were superimposed to form a more uniform acceleration field within the grillage area for effective removal of contaminants. In order to assess potential resonance issues, a finite element model was used to simulate the four-pad support, which is currently proposed for the EPL mask standard chuck. The fundamental frequency of the mask in the four-pad support was over 300Hz.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrew R. Mikkelson, Cheng-Fu Chen, Roxann L. Engelstad, Edward G. Lovell, "Vibrational analysis of 200-mm EPL masks", Proc. SPIE 4343, Emerging Lithographic Technologies V, (20 August 2001); doi: 10.1117/12.436698; https://doi.org/10.1117/12.436698


Proceedings of SPIE (December 07 1994)
TSOM method for semiconductor metrology
Proceedings of SPIE (April 20 2011)
Challenges and opportunities for EPL and EUVL masks
Proceedings of SPIE (April 09 2001)
Modeling LEEPL mask fabrication processes
Proceedings of SPIE (May 20 2004)

Back to Top