22 August 2001 Electric force microscopy with a single carbon nanotube tip
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Abstract
Carbon nanotube tips offer a significant improvement over standard scanned probe microscope (SPM) tips for electrical characterization of nanodevice structures. Carbon nanotube tips are compatible with requirements for integrated SPM_probe station instruments in which SPM-based lithography, topography, electric force microscopy, and traditional current-voltage measurements are performed simultaneously or sequentially. As device dimensions shrink, traditional diagnostics will be unable to probe nanometer-scale phenomena that affect device performance and reliability. At the same time, the introduction of novel materials such as silicon-on-insulator into standard processing will require methods that can rapidly identify defects and their local behavior. Electric force microscopy with carbon nanotube tips offers unique capabilities for satisfying these needs.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John A. Dagata, John A. Dagata, F. S. S. Chien, F. S. S. Chien, S. Gwo, S. Gwo, K. Morimoto, K. Morimoto, Takahito Inoue, Takahito Inoue, J. Itoh, J. Itoh, Hiroshi Yokoyama, Hiroshi Yokoyama, } "Electric force microscopy with a single carbon nanotube tip", Proc. SPIE 4344, Metrology, Inspection, and Process Control for Microlithography XV, (22 August 2001); doi: 10.1117/12.436728; https://doi.org/10.1117/12.436728
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