22 August 2001 Measurement precision of optical scatterometry
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In the work reported here, we discuss the measurement precision of two scatterometry techniques, the variable angle and the variable wavelength techniques. The issue of interest is the measurement precision of the sample parameters. This is determined by both the sensitivity of the diffraction measurable to changes in sample parameters and the precision with which the measurable can be determined. This approach includes taking into account the correlation effect between the contribution to the measurable of the various grating parameters to be determined, such as linewidth and height. The comparison of the theoretical predictions of precision for angle-resolved and wavelength-resolved scatterometer measurements shows no conclusive hierarchy. Practical considerations, however, indicate that angular-resolved scatterometry is a more advantageous technique. For both methods, decreasing the wavelength of the light source improves the determination precision of the sample parameters.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Petre-Catalin Logofatu, Petre-Catalin Logofatu, John Robert McNeil, John Robert McNeil, } "Measurement precision of optical scatterometry", Proc. SPIE 4344, Metrology, Inspection, and Process Control for Microlithography XV, (22 August 2001); doi: 10.1117/12.436770; https://doi.org/10.1117/12.436770

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