Scatterometry for shallow trench isolation (STI) process metrology

Christopher J. Raymond; Michael E. Littau; Richard J. Markle; Matthew A. Purdy

doi:10.1117/12.436798

22 August 2001 Scatterometry for shallow trench isolation (STI) process metrology

Christopher J. Raymond, Michael E. Littau, Richard J. Markle, Matthew A. Purdy

Proceedings Volume 4344, Metrology, Inspection, and Process Control for Microlithography XV; (2001) https://doi.org/10.1117/12.436798
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

Scatterometry is a non-destructive optical metrology based on the analysis of light scattered form a periodic sample. In this research angular scatterometry measurements were performed on three wafers processed using shallow trench isolation (STI) technology. The periodic features that were measured on these wafers were composite etched gratings comprised of SiN on oxide on Si. The wafers were processed at three different etch times in order to generate different etch depths (shallow, nominal and deep). It was at this point in the process that the scatterometry measurements were performed. The scatterometry model was comprised of four parameters: Si thickness, SiN thickness, linewidth and sidewall angle. For comparison purposes measurements were also performed using a critical dimension scanning electron microscope (CD-SEM), a cross-section SEM and an atomic force microscope (AFM). The results show good agreement between the scatterometry measurements and the other technologies.

Citation Download Citation

Christopher J. Raymond, Michael E. Littau, Richard J. Markle, and Matthew A. Purdy "Scatterometry for shallow trench isolation (STI) process metrology", Proc. SPIE 4344, Metrology, Inspection, and Process Control for Microlithography XV, (22 August 2001); https://doi.org/10.1117/12.436798

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available