14 September 2001 Br lamp for F2 laser wavelength calibration
Author Affiliations +
Abstract
Recently, we have developed a novel Br lamp for the F2 laser wavelength calibration. In order to examine the validity of this lamp, we measured emission lines of this lamp in 157 nm region and analyzed them. From our result, it has been confirmed that the spectral profile of the 157.6387 nm (2P3/2 - 4P5/2) emission line of Br atom is unchangeable to the parameters of lamp designs and lamp operating conditions. One of the reasons will be shown here. Hence our novel Br lamp is to be the promising candidate for the 157 nm F2 laser wavelength calibration.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Masaki Yoshioka, Tetsuya Kitagawa, Tomoyoshi Arimoto, Hiromitsu Matsuno, Tatsumi Hiramoto, Toru Suzuki, Kazuaki Hotta, "Br lamp for F2 laser wavelength calibration", Proc. SPIE 4346, Optical Microlithography XIV, (14 September 2001); doi: 10.1117/12.435659; https://doi.org/10.1117/12.435659
PROCEEDINGS
6 PAGES


SHARE
Back to Top