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14 September 2001 Br lamp for F2 laser wavelength calibration
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Recently, we have developed a novel Br lamp for the F2 laser wavelength calibration. In order to examine the validity of this lamp, we measured emission lines of this lamp in 157 nm region and analyzed them. From our result, it has been confirmed that the spectral profile of the 157.6387 nm (2P3/2 - 4P5/2) emission line of Br atom is unchangeable to the parameters of lamp designs and lamp operating conditions. One of the reasons will be shown here. Hence our novel Br lamp is to be the promising candidate for the 157 nm F2 laser wavelength calibration.
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Masaki Yoshioka, Tetsuya Kitagawa, Tomoyoshi Arimoto, Hiromitsu Matsuno, Tatsumi Hiramoto, Toru Suzuki, and Kazuaki Hotta "Br lamp for F2 laser wavelength calibration", Proc. SPIE 4346, Optical Microlithography XIV, (14 September 2001);

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