Mutually optimizing resolution enhancement techniques: illumination, APSM, assist feature OPC, and gray bars

Bruce W. Smith

doi:10.1117/12.435747

14 September 2001 Mutually optimizing resolution enhancement techniques: illumination, APSM, assist feature OPC, and gray bars

Bruce W. Smith

Author Affiliations +

Proceedings Volume 4346, Optical Microlithography XIV; (2001) https://doi.org/10.1117/12.435747
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

As sub-half wavelength optical lithography is pursued, the variety of imaging requirements increases. This can result in complex combinations of various resolution enhancement techniques. Optimization based on simple standards or rules is not possible. Although the goal is to design processes so that enhancement approaches work cooperatively as manufacturable solutions, it is often an overwhelming task. Problems often arise as analysis is carried out in a spatial domain, where mask and image properties are evaluated using sizing or dimensional evaluation. A more appropriate perspective for image optimization is that of the lens pupil, in a spatial frequency domain. In this paper, we describe the common characteristics of resolution enhancement, beyond the historical comparisons of alternating PSM and strong OAI. Enhancement techniques including assist feature OPC, custom illumination, attenuated PSM, and pupil filtering are described from a spatial frequency standpoint where each can be utilized to take advantage of strengths and avoid weaknesses. As a result of this type of analysis, we will also describe an alternative OPC method where assist features of varying tone, referred to as Gray Bars, provide for significant image improvement.

Citation Download Citation

Bruce W. Smith "Mutually optimizing resolution enhancement techniques: illumination, APSM, assist feature OPC, and gray bars", Proc. SPIE 4346, Optical Microlithography XIV, (14 September 2001); https://doi.org/10.1117/12.435747

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available