12 April 2001 Laser-induced damage of fluoride coatings for UV lasers
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Abstract
UV and DUV lasers are very important for many applications such as micro-machining, new material creation, medical care, and photo-lithography. Laser-induced damage of thin films coated on optical components used for UV and DUV lasers are serious problem. We have developed a new technique for producing anti- reflection (AR) coating on various substrate materials including fused silica glass and CaF2 crystal. In this technique, porous magnesium fluoride (MgF2) AR coating was developed. The reflectance of the porous AR coating on fused silica substrate was 0.3% at 500 nm.
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K. Yoshida, K. Yoshida, M. Ohya, M. Ohya, K. Yagi, K. Yagi, Toshimasa Matsuoka, Toshimasa Matsuoka, Kanyoshi Ochi, Kanyoshi Ochi, M. Sunagawa, M. Sunagawa, Tomosumi Kamimura, Tomosumi Kamimura, } "Laser-induced damage of fluoride coatings for UV lasers", Proc. SPIE 4347, Laser-Induced Damage in Optical Materials: 2000, (12 April 2001); doi: 10.1117/12.425066; https://doi.org/10.1117/12.425066
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