12 April 2001 Use of hafnia/silica multilayer coatings on large mirrors and polarizers for the National Ignition Facility
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Abstract
Multilayer coatings with high damage resistance at 1054 nm can be produced with a metallic hafnium starting material and silicon dioxide (the damage characteristics of these coatings are discussed in detail in a companion paper submitted to this conference). These films have the potential of exhibiting good performance for a high fluence laser if all other optical specifications can be met by the coating. This paper discusses the methods used to prepare a large substrate and coat it with a multilayer meeting damage, spectral, surface flatness, and uniformity specifications. The highly stable processes developed to e-beam coat hafnia and silica are also conducive to producing well-calibrated, highly deterministic uniform films, essential to meeting some of the NIF specifications. The residual stress in the films is controlled mainly through control of residual gas pressures during deposition of the silica layer and is specific to the substrate material and relative humidity in the use environment. Process details for production of these coatings will be discussed.
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Douglas J. Smith, Douglas J. Smith, James B. Oliver, James B. Oliver, Jim Howe, Jim Howe, Christopher J. Stolz, Christopher J. Stolz, Amy L. Rigatti, Amy L. Rigatti, } "Use of hafnia/silica multilayer coatings on large mirrors and polarizers for the National Ignition Facility", Proc. SPIE 4347, Laser-Induced Damage in Optical Materials: 2000, (12 April 2001); doi: 10.1117/12.425072; https://doi.org/10.1117/12.425072
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