1 February 2001 3D finite element modeling of micromachined catheter sensor with corrugated diaphragm
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Proceedings Volume 4348, Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (2001); doi: 10.1117/12.417675
Event: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, 2000, St. Petersburg, Russian Federation
Abstract
The paper presents some results of the 3D finite element (FE) modeling of a catheter pressure sensor that is used for biomedical purposes. Its applications specificity entails some features at its designing and manufacturing that it is necessary to take into account at the FE analysis of the sensor.
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Alexei I. Borovkov, Evgenij N. Pyatishev, Mihail S. Lurie, Y. D. Akulshin, E. V. Pereyaslavets, "3D finite element modeling of micromachined catheter sensor with corrugated diaphragm", Proc. SPIE 4348, Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (1 February 2001); doi: 10.1117/12.417675; https://doi.org/10.1117/12.417675
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KEYWORDS
Sensors

3D modeling

Finite element methods

Mercury

Silicon

Microsensors

Manufacturing

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