1 February 2001 Microscale effects of silicon-on-glass micromechanical devices: experimental results and 3D finite element modeling
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Proceedings Volume 4348, Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (2001) https://doi.org/10.1117/12.417674
Event: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, 2000, St. Petersburg, Russian Federation
Abstract
The sensors measuring parameters of mobile objects are the important components of modern inertial systems. They should have sufficient accuracy, tiny sizes, and low cost at high reliability in operation. From all types of sensitive elements micromechanical gyroscopes and accelerometers most full meet the requirements mentioned above. Development of micromechanical sensitive elements is connected with the technology used in solid-state microelectronics (photolithography, isotropic and anisotropic etching, etc.) and application of nonmetallic materials (monocrystal silicon, silicon carbide, quartz, piezoceramics, etc.). Small-sized inertial navigating systems on the basis of micromechanical sensors at the appropriate integration with Global Positioning System (GPS) receivers provide high enough accuracy in the decision of navigation, orientation, and management problems. In this paper some experimental results received at manufacturing of a micromechanical vibrogyroscope are discussed. More full research of the given vibrosensor including reception of new practical results is carried out with the help of 3D finite element analysis.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexei I. Borovkov, Alexei I. Borovkov, Evgenij N. Pyatishev, Evgenij N. Pyatishev, Mihail S. Lurie, Mihail S. Lurie, E. V. Pereyaslavets, E. V. Pereyaslavets, V. P. Lunev, V. P. Lunev, A. N. Kazakin, A. N. Kazakin, Irina V. Popova, Irina V. Popova, A. M. Lestiev, A. M. Lestiev, } "Microscale effects of silicon-on-glass micromechanical devices: experimental results and 3D finite element modeling", Proc. SPIE 4348, Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (1 February 2001); doi: 10.1117/12.417674; https://doi.org/10.1117/12.417674
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