22 February 2001 Chemical dissolution of III-V and II-VI semiconductor compounds in solutions of HNO3-HCl-lactic acid system
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Proceedings Volume 4355, Fifth International Conference on Material Science and Material Properties for Infrared Optoelectronics; (2001) https://doi.org/10.1117/12.417792
Event: Fifth International Conference on Material Science and Material Properties for Infrared Optoelectronics, 2000, Kiev, Ukraine
Abstract
The nature of CdTe, Cd1-XZnXTe solid solutions, InAs and InSb dissolution in the mixture of HNO3-HCl-lactic acid system are investigated. The surfaces of equal etching rates (Gibbs diagrams) are constructed, limiting stages of dissolution process and regions of polishing solutions in this system are determined.
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V. N. Tomashik, V. N. Tomashik, Z. F. Tomashik, Z. F. Tomashik, S. G. Danylenko, S. G. Danylenko, Ye. O. Bilevych, Ye. O. Bilevych, } "Chemical dissolution of III-V and II-VI semiconductor compounds in solutions of HNO3-HCl-lactic acid system", Proc. SPIE 4355, Fifth International Conference on Material Science and Material Properties for Infrared Optoelectronics, (22 February 2001); doi: 10.1117/12.417792; https://doi.org/10.1117/12.417792
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