7 March 2001 Application of heterodyne interferometry for the full-field surface shape measurement
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Proceedings Volume 4356, 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; (2001) https://doi.org/10.1117/12.417825
Event: 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2000, Velke Losiny, Czech Republic
Abstract
The subject of the paper is the presentation of applications of the full-field heterodyne interferometer. The description of the interferometer used is given. The basic relations for the fast CCD Dalsa camera are cited. The sources of the measurement errors are discussed. The result of testing the frequency difference stability of acousto-optic modulators are described.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Romulad Jozwicki, Romulad Jozwicki, Tomasz S. Tkaczyk, Tomasz S. Tkaczyk, "Application of heterodyne interferometry for the full-field surface shape measurement", Proc. SPIE 4356, 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, (7 March 2001); doi: 10.1117/12.417825; https://doi.org/10.1117/12.417825
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