23 February 2001 Measuring micro floor vibrations with distributed fiber optic sensors
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Proceedings Volume 4357, Distributed Fiber Optical Sensors and Measuring Networks; (2001) https://doi.org/10.1117/12.417879
Event: Distributed Fiber Optical Sensors and Measuring Networks, 2000, none, Russian Federation
Abstract
In certain applications, such as microelectronic manufacturing, monitoring and controlling small floor vibrations can be essential. This paper describes how an array of distributed fiber optic sensors can be used to monitor micro floor vibrations as part of an adaptive control strategy. The performance target is to limit vibrations in the 10 Hz frequency range to less than 10 microinches peak to peak. The distributed fiber optic sensors are of an interferometric design that uses a single mode to multi mode to single mode configuration. The fibers can be arranged in a grid so as to localize vibration hot spots. Data comparing the performance of the vibration sensing array with that of conventional point piezoelectric accelerometers, as well as sensing and control strategies will be presented.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dryver R. Huston, Dryver R. Huston, William B. Spillman, William B. Spillman, Wolfgang Sauter, Wolfgang Sauter, Noel V. Pelczarski, Noel V. Pelczarski, "Measuring micro floor vibrations with distributed fiber optic sensors", Proc. SPIE 4357, Distributed Fiber Optical Sensors and Measuring Networks, (23 February 2001); doi: 10.1117/12.417879; https://doi.org/10.1117/12.417879
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