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10 October 2001 Electrostatic flexible film actuators as IR choppers for pyroelectric detectors or microbolometers
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Abstract
Flexible film electrostatic MEMS actuators can be used as micromachined IR choppers for pyroelectric and microbolometer sensors. The flexible actuators act as tightly curled shutters, providing transmission of IR radiation to the sensor elements when open and reflection of the IR when closed. These actuators consist of a polymer/metal film stack which is microfabricated and released from a substrate. Thermal and mechanical stress in the film stack causes the actuator to curl when released, and the film can be uncurled by applying an electric field between the curled film and the substrate. Tightly curled actuators in the range of 50 μm to 1 mm square have been fabricated, and arrays have been produced and operated. Operating voltage is in the range of 50 - 300 V with frequencies > 5 kHz. The performance of these actuators is presented, and their applicability to IR choppers is discussed.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David Edward Dausch, Scott H. Goodwin-Johansson, Gary McGuire, Leslie D. Kramer, and Mark R. Davidson "Electrostatic flexible film actuators as IR choppers for pyroelectric detectors or microbolometers", Proc. SPIE 4369, Infrared Technology and Applications XXVII, (10 October 2001); https://doi.org/10.1117/12.445338
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