High-resolution pyroelectric linear arrays based on LiTaO3

Volkmar Norkus; Gerald Gerlach; Guenter Hofmann

doi:10.1117/12.445300

10 October 2001 High-resolution pyroelectric linear arrays based on LiTaO₃

Volkmar Norkus, Gerald Gerlach, Guenter Hofmann

Author Affiliations +

Proceedings Volume 4369, Infrared Technology and Applications XXVII; (2001) https://doi.org/10.1117/12.445300
Event: Aerospace/Defense Sensing, Simulation, and Controls, 2001, Orlando, FL, United States

Abstract

Lithium tantalate (LiTaO₃) is a material that is excellently suited for pyroelectric infrared detectors. Its figures of merit are first rate, it has a good long-time stability and it is available at reasonable cost. Researchers at the Institute for Solid State Electronics have been developing a flexible technology to manufacture LiTaO₃ detectors for the last twelve years. As a result, devices can be produced that can be optimally adjusted to the planned application. This paper describes the design and basic features of linear arrays with up to 256 responsive elements. The arrays are hybrid devices consisting of the pyroelectric chip and a CMOS multiplexer. It is demonstrated that special patterning technologies (ion beam etching) and optical functional layers on the responsive element considerably increase the thermal and spatial resolution. Thus, NEP values smaller than 0.2 nW were obtained at 40 Hz chopper frequency. Main applications of detectors are the contactless temperature measurement and -- increasingly -- the spectrometry in the wavelength range 0.8 ... 25 μm.

Citation Download Citation

Volkmar Norkus, Gerald Gerlach, and Guenter Hofmann "High-resolution pyroelectric linear arrays based on LiTaO₃", Proc. SPIE 4369, Infrared Technology and Applications XXVII, (10 October 2001); https://doi.org/10.1117/12.445300

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