Fabrication of multilayer GaAlAs/GaAs microtips for VCSEL-based optical near-field sensors

Christophe Gorecki; Sabry Khalfallah

doi:10.1117/12.445593

23 October 2001 Fabrication of multilayer GaAlAs/GaAs microtips for VCSEL-based optical near-field sensors

Christophe Gorecki, Sabry Khalfallah

Proceedings Volume 4400, Microsystems Engineering: Metrology and Inspection; (2001) https://doi.org/10.1117/12.445593
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

We propose to fabricate GaAlAs/GaAs multi-layer microtips for scanning near-field optical microscopy (SNOM) using the anisotropic etching. The etching was performed in a solution of H₃PO₄:H₂O₂:H₂O, operating at the temperature of 10 degrees C. We obtained the pyramid-shaped microtips with four etched facets and with a radius of curvature at the apex lower than 50 nm.

Citation Download Citation

Christophe Gorecki and Sabry Khalfallah "Fabrication of multilayer GaAlAs/GaAs microtips for VCSEL-based optical near-field sensors", Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); https://doi.org/10.1117/12.445593

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