Fully integrated on-chip laboratories for MEMS-based material and structure mechanical analysis

Patrice Minotti

doi:10.1117/12.445594

23 October 2001 Fully integrated on-chip laboratories for MEMS-based material and structure mechanical analysis

Patrice Minotti

Proceedings Volume 4400, Microsystems Engineering: Metrology and Inspection; (2001) https://doi.org/10.1117/12.445594
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

Industrialization of MEMS devices such as silicon-based sensors and actuators requires specific tools to verify that their mechanical properties and/or motions obey the designer's's intent. Accordingly, this paper investigates new on-chip laboratories that will allow systematic mechanical analysis of MEMS-based structures and materials.

Citation Download Citation

Patrice Minotti "Fully integrated on-chip laboratories for MEMS-based material and structure mechanical analysis", Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); https://doi.org/10.1117/12.445594

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