23 October 2001 Fully integrated on-chip laboratories for MEMS-based material and structure mechanical analysis
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Proceedings Volume 4400, Microsystems Engineering: Metrology and Inspection; (2001) https://doi.org/10.1117/12.445594
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany
Abstract
Industrialization of MEMS devices such as silicon-based sensors and actuators requires specific tools to verify that their mechanical properties and/or motions obey the designer's's intent. Accordingly, this paper investigates new on-chip laboratories that will allow systematic mechanical analysis of MEMS-based structures and materials.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Patrice Minotti, Patrice Minotti, } "Fully integrated on-chip laboratories for MEMS-based material and structure mechanical analysis", Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); doi: 10.1117/12.445594; https://doi.org/10.1117/12.445594
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