23 October 2001 Microfabricated ZnSe diffractive optical elements for CO2 laser
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Proceedings Volume 4400, Microsystems Engineering: Metrology and Inspection; (2001) https://doi.org/10.1117/12.445598
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany
Abstract
We have developed a new design of advanced optics for processing high-power laser material. We introduce the concept of DOE for high power CO2 lasers. The superior functionality of DOE means that it could become the new standard in optics for next generation devices. Here we describe the design of our DOE technology using scalar theory and micro fabrication using photolithography and RIE. We also present results of our ZnSe-DOE technology, mainly focusing on a novel spot-array generator.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Keiji Ebata, Keiji Ebata, Keiji Fuse, Keiji Fuse, Kenichi Kurisu, Kenichi Kurisu, Takeshi Okada, Takeshi Okada, Takayuki Hirai, Takayuki Hirai, Hirokuni Nanba, Hirokuni Nanba, } "Microfabricated ZnSe diffractive optical elements for CO2 laser", Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); doi: 10.1117/12.445598; https://doi.org/10.1117/12.445598
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