Translator Disclaimer
23 October 2001 Optical measurement methods to study dynamic behavior in MEMS
Author Affiliations +
Proceedings Volume 4400, Microsystems Engineering: Metrology and Inspection; (2001)
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany
The maturing designs of moving microelectromechanical systems (MEMS) make it more-and-more important to have precise measurements and visual means to characterize dynamic microstructures. The Berkeley Sensor&Actuator Center (BSAC) has a forefront project aimed at developing these capabilities and at providing high-speed Internet (Supernet) access for remote use of its facilities. Already in operation are three optical-characterization tools: a stroboscopic-interferometer system, a computer-microvision system, and a laser-Doppler vibrometer. This paper describes precision and limitations of these systems and discusses their further development. In addition, we describe the results of experimental studies on the different MEMS devices, and give an overview about high-speed visualization of rapidly moving MEMS structures.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christian Rembe, Rishi Kant, and Richard S. Muller "Optical measurement methods to study dynamic behavior in MEMS", Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001);


VCSELs for interferometric readout of MEMS sensors
Proceedings of SPIE (March 17 2016)
Cryogenic high resolution translation unit (CTU)
Proceedings of SPIE (July 22 2008)
Imaging Of The Wavefront Under Test In Interferometry
Proceedings of SPIE (November 19 1985)
Scan Interferometer
Proceedings of SPIE (January 15 1989)

Back to Top