23 October 2001 Quantitative optical measurement of microcantilever vibration: applications to near-field microsensor
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Proceedings Volume 4400, Microsystems Engineering: Metrology and Inspection; (2001) https://doi.org/10.1117/12.445591
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany
Abstract
Optical measuring techniques in MEMS are attractive ways of detection and reproducible methods. Applications of appropriate optical measuring techniques can be found in many situations: local study of materials constants, characterization of micromechanical systems, vibration analysis, and environmental behavior.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pascal Vairac, Rodrigue Rousier, Raphail Patois, Bernard Cretin, "Quantitative optical measurement of microcantilever vibration: applications to near-field microsensor", Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); doi: 10.1117/12.445591; https://doi.org/10.1117/12.445591
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