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23 October 2001 Waveguide microinterferometry system for microelements investigation
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Proceedings Volume 4400, Microsystems Engineering: Metrology and Inspection; (2001)
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany
In this paper the measurement concept based on full-field optical methods is presented. In order to fulfil most of the requirements connected with advanced micro element and micro material testing a waveguide micro interferometer based on grating interferometry method is proposed and described in details. The modification of this system for 3D-displacement measurements is presented. The applicability of the micro interferometer is shown at the examples of silicon beam and micro membranes testing.
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Leszek A. Salbut, Michal Jozwik, Christophe Gorecki, and Seung Seoup Lee "Waveguide microinterferometry system for microelements investigation", Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001);

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