Absolute measurement of planarity: pixel versus Zernike data analysis

Vincenzo Greco; Giuseppe Molesini

doi:10.1117/12.445632

22 October 2001 Absolute measurement of planarity: pixel versus Zernike data analysis

Vincenzo Greco, Giuseppe Molesini

Proceedings Volume 4401, Recent Developments in Traceable Dimensional Measurements; (2001) https://doi.org/10.1117/12.445632
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

Relating two different methods of data analysis for assessing the absolute planarity of reference flats is reported. Considered methods are based on Zernike representation and pixel handling, respectively. Operations to be implemented on interferometric systems to use the same data set for comparative processing are described.

Citation Download Citation

Vincenzo Greco and Giuseppe Molesini "Absolute measurement of planarity: pixel versus Zernike data analysis", Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); https://doi.org/10.1117/12.445632

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available