22 October 2001 Absolute measurement of planarity: pixel versus Zernike data analysis
Author Affiliations +
Proceedings Volume 4401, Recent Developments in Traceable Dimensional Measurements; (2001) https://doi.org/10.1117/12.445632
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany
Abstract
Relating two different methods of data analysis for assessing the absolute planarity of reference flats is reported. Considered methods are based on Zernike representation and pixel handling, respectively. Operations to be implemented on interferometric systems to use the same data set for comparative processing are described.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vincenzo Greco, Giuseppe Molesini, "Absolute measurement of planarity: pixel versus Zernike data analysis", Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445632; https://doi.org/10.1117/12.445632
PROCEEDINGS
4 PAGES


SHARE
Back to Top