22 October 2001 Automatic gauge block measurement by phase stepping interferometry with three laser wavelengths
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Proceedings Volume 4401, Recent Developments in Traceable Dimensional Measurements; (2001) https://doi.org/10.1117/12.445608
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany
Abstract
An evaluation system for automatic measurements of short gauge blocks by interferometry is described. The system is based on a commercially available Twyman-Green interferometer which has been modified so that phase stepping interferometry can be applied. Three stabilized lasers are used to determine the gauge block length by the method of exact fractions. The data of the evaluated interference phase have to be processed to enable automatic identification of the gauge block's measuring face in the interference pattern and to determine characteristic quantities of the gauge block under test. The uncertainty contribution of the interference evaluation for the central length is approximately 1,5 nm which is sufficiently small compared with other uncertainty contributions of the measurement process.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gerhard Boensch, Gerhard Boensch, } "Automatic gauge block measurement by phase stepping interferometry with three laser wavelengths", Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445608; https://doi.org/10.1117/12.445608
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