22 October 2001 Gauge block interferometer using three frequency-stabilized lasers
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Proceedings Volume 4401, Recent Developments in Traceable Dimensional Measurements; (2001) https://doi.org/10.1117/12.445633
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany
Abstract
We have developed a gauge block measurement system that uses three frequency-stabilized lasers. The stabilized lasers are as follows: an I2 stabilized offset locked He-Ne laser, an I2-stabilized Nd:YAG laser, and a Rb-stabilized diode laser. The I2-stabilized offset locked He-Ne laser is commercially available and its relative wavelength uncertainty is 2.5 X 10-11. An I2-stabilized Nd:YAG laser and a Rb-stabilized diode laser was developed in our institute and their relative wavelength uncertainties are 5 X 10-12 and 1 X 10-9, respectively. In the measurement system, laser beams were introduced to the interferometer using an optical multimode fiber. An interferometer fringe pattern was taken using a CCD camera and the excess fraction parts were calculated from the fringe pattern using the Fourier transform method. The excess fraction part obtained from the Rb-stabilized semiconductor laser was used only to determine the integer part of the fringe order, because the accuracy and stability of the wavelength were not sufficient for the long gauge block measurements. This interferometer can measure gauge blocks of up to 1000 nm long and the standard uncertainty of the interferometer is about 75 nm for a 1000 mm long gauge block.
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Youichi Bitou, Youichi Bitou, Akiko Hirai, Akiko Hirai, Hideaki Yoshimori, Hideaki Yoshimori, Feng-Lei Hong, Feng-Lei Hong, Yun Zhang, Yun Zhang, Atsushi Onae, Atsushi Onae, Katuo Seta, Katuo Seta, } "Gauge block interferometer using three frequency-stabilized lasers", Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445633; https://doi.org/10.1117/12.445633
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