22 October 2001 Improved calibration of an interference microscope
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Proceedings Volume 4401, Recent Developments in Traceable Dimensional Measurements; (2001) https://doi.org/10.1117/12.445634
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany
The calibration of our interference microscope is currently performed by an elaborate multi step process. As a result the total uncertainty of a measurement performed with the interference microscope is much larger than the intrinsic repeatability of the microscope which is of the order of 1 nm. A major contribution to the total uncertainty is a length dependent factor, resulting from a calibration step using gauge blocks that finally yields 8 nm uncertainty for a step height of 2 micrometers . In order to reduce the total uncertainty we propose a novel step-height standard and calibration procedure. The standard is adjustable and can be simultaneously measured with the interference microscope and a laser interferometer allowing calibration of the entire dynamic range of the microscope with a single artefact. The new calibration method eliminates the process that contributes most to the total uncertainty budget in the current procedure. A possible implementation of the step-height standard is presented.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Richard Koops, Richard Koops, "Improved calibration of an interference microscope", Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445634; https://doi.org/10.1117/12.445634


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