22 October 2001 Quadrature phase interferometer used to calibrate dial indicator calibrators
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Proceedings Volume 4401, Recent Developments in Traceable Dimensional Measurements; (2001) https://doi.org/10.1117/12.445644
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany
To calibrate dial indicators, gage blocks or dial indicator calibrators are usually used. For better accuracy and resolution, interferometers are used to calibrate dial indicator calibrators. Systematic errors of laser interferometers can be classified into three categories of intrinsic errors, environment errors and installation errors. Intrinsic errors include laser wavelength error, electronic error and optics nonlinearity. In order to achieve nanometer accuracy, minimizing intrinsic error is crucial. In this paper, we will address the problems of minimizing the optics nonlinearity error and describe the discrete-time signal processing method to minimize the electronic error, nonlinearity error and drift by simply using quadrature phase interferometer for nanometer accuracy and linearity.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shau-Chi Huang, Shau-Chi Huang, Huay-Chung Liou, Huay-Chung Liou, Gwo-Sheng Peng, Gwo-Sheng Peng, Ming-Feng Lu, Ming-Feng Lu, } "Quadrature phase interferometer used to calibrate dial indicator calibrators", Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445644; https://doi.org/10.1117/12.445644

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