Progress of light source technologies from KrF laser to F2 laser

Hakaru Mizoguchi

doi:10.1117/12.425220

26 April 2001 Progress of light source technologies from KrF laser to F₂ laser

Hakaru Mizoguchi

Proceedings Volume 4404, Lithography for Semiconductor Manufacturing II; (2001) https://doi.org/10.1117/12.425220
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

More than 1,000 units of KrF excimer laser steppers were already installed in semiconductor mass-production lines which require design rule of less than 0.15 micrometers . Higher NA lens compatibility, productivity and CoO become critical issues of KrF excimer laser stepper. Advanced 2kHz KrF excimer laser G20K/G21K offers the solutions for these three issues. Next generation excimer laser ArF has already finished the stage of principle demonstration and has moved to next level of practical inspection, such as stability, productivity, and economic efficiency. Gigaphoton 4kHz ArF, G40A, solved all of these issues. Furthermore sub-0.10 micrometers design rule region F₂ laser has been examined at several organizations. In March, 2000, Komatsu successfully developed 2kHz F₂ laser for catadioptric projection optics by the fund of NEDO. Gigaphoton is ready to fabricate G20F, 2kHz F2 laser based upon the result of NEDO research. ASET started new F₂ laser lithography development program at Hiratsuka Research Center with collaboration of Nikon, Canon, Gigaphoton, Komatsu, and Ushio from April 2000, ending March 2002.

Citation Download Citation

Hakaru Mizoguchi "Progress of light source technologies from KrF laser to F₂ laser", Proc. SPIE 4404, Lithography for Semiconductor Manufacturing II, (26 April 2001); https://doi.org/10.1117/12.425220

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available