23 April 2001 New novel method for solving ASML alignment fail (model error) in color filter process
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Abstract
For better resolution and throughput concern on color filter process, we use ASML5500/100 for color filter production instead of 1X CANON, but it often suffered alignment fail (error code: model error) at the green layer. Some items have been studied: (1) pattern close to ASML PM mark; (2) level sensor issue (level sensor contamination, plate tilt, level lens contamination); (3) different process sequence; (4) open the clear-out window at passivation layer to reduce interference effect. All of these items are proved no obviously influence to induce model error. By checking the spectrum of the green photo-resist, we found that it is low transmittance at 633 nm1 (the wavelength that the ASML alignment laser uses). Raising the transmittance by reducing the thickness of green resist is proved useful to eliminate the occurrence of model error. On the other hand, the ATHENATM provided by ASML which use red and green lights for alignment will get rid of the alignment failure.
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Fu-Tien Weng, Fu-Tien Weng, Chung-Sheng Hsiung, Chung-Sheng Hsiung, Yu-Kung Hsiao, Yu-Kung Hsiao, Sheng-Liang Pang, Sheng-Liang Pang, Kuo-Liang Lu, Kuo-Liang Lu, } "New novel method for solving ASML alignment fail (model error) in color filter process", Proc. SPIE 4406, In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing II, (23 April 2001); doi: 10.1117/12.425276; https://doi.org/10.1117/12.425276
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