30 April 2001 Bio/chemical microsystem designed for wafer scale testing
Author Affiliations +
Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425298
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom
We have designed a bio/chemical microsystem for online monitoring of glucose concentrations during fermentation. The system contains several passive microfluidic components including an enzyme reactor, a flow lamination part and a detector. Detection is based on the reaction of hydrogen peroxide, that is produced from glucose in an enzyme reactor, with luminol. This chemiluminescent reaction generates light that is detected by an integrated back-side contacted photodiode array. Various tests during fabrication are outlined with the emphasis on microwave detected photo conductance decay. The presented microsystem has both fluidic and electrical connection points accessible from the backside. This allows simultaneous testing of both fluidic and electrical parts before dicing the wafer.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anders M. Jorgensen, Anders M. Jorgensen, Klaus B. Mogensen, Klaus B. Mogensen, Weimin Rong, Weimin Rong, Pieter Telleman, Pieter Telleman, Joerg P. Kutter, Joerg P. Kutter, } "Bio/chemical microsystem designed for wafer scale testing", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425298; https://doi.org/10.1117/12.425298


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