Heterogeneous substrates for high-temperature and optical applications

Manfred Reiche; V. Dragoi; M. Alexe; Ulrich M. Goesele; Erich Thallner; Ch. Schaefer; F. P. Lindner

doi:10.1117/12.425327

30 April 2001 Heterogeneous substrates for high-temperature and optical applications

Manfred Reiche; V. Dragoi; M. Alexe; Ulrich M. Goesele; Erich Thallner; Ch. Schaefer; F. P. Lindner

Author Affiliations +

Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425327
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

Further applications of MEMS require the combination of different materials in order to combine different functions in one and the same system. Besides conventional techniques (layer deposition methods) semiconductor wafer direct bonding is expected to be an effective method to produce heterogeneous materials. Different examples for optical and high-temperature applications are presented (Si-based heterostructures, Si/GaAs heterostructures).

Citation Download Citation

Manfred Reiche, Manfred Reiche, V. Dragoi, V. Dragoi, M. Alexe, M. Alexe, Ulrich M. Goesele, Ulrich M. Goesele, Erich Thallner, Erich Thallner, Ch. Schaefer, Ch. Schaefer, F. P. Lindner, F. P. Lindner, } "Heterogeneous substrates for high-temperature and optical applications", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425327; https://doi.org/10.1117/12.425327

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years