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30 April 2001 High-level simulation of an electrostatic micromotor
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Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001)
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom
To date, electrostatic microactuators have mostly bee simulated using tools that involve accurate but complex finite element analysis methods. When such an analysis forms part of a full electro-mechanical simulation, the quantity of computations necessary is excessively demanding whenever rapid results are required. High-level simulation of electrostatic actuation that includes closed-form expressions of the static and dynamic behaviors of the device, seems a best alternative for rapid prototyping. The work presented in this article is focused on the high-level simulation of a particular class of actuators, the wobble electrostatic micromotor. The high-level simulation of the motor and its surrounding electronics (control loop, power supply, sensory circuitry) shows aspects of its performance that cannot be seen by any other means. As in conventional electronic systems, this approach also offers a faster and cheaper way of designing and debugging system models, by exchanging Intellectual Property blocks across different designer teams.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Aitor Endemano, Matthew Dunnigan, and Marc P.Y. Desmulliez "High-level simulation of an electrostatic micromotor", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001);

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