Low-cost in-line phase shifter (IPS) using electrostatic MEMS for large antenna arrays

Seong-Hwoon Kim; Jeff Dean; Leslie D. Kramer

doi:10.1117/12.425309

30 April 2001 Low-cost in-line phase shifter (IPS) using electrostatic MEMS for large antenna arrays

Seong-Hwoon Kim, Jeff Dean, Leslie D. Kramer

Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425309
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

This paper describes the In-line Phase Shifter concept and presents some preliminary results of implementing a cost effective phase shifter utilizing electrostatic MEMs actuators.

Citation Download Citation

Seong-Hwoon Kim, Jeff Dean, and Leslie D. Kramer "Low-cost in-line phase shifter (IPS) using electrostatic MEMS for large antenna arrays", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425309

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