30 April 2001 Low-cost in-line phase shifter (IPS) using electrostatic MEMS for large antenna arrays
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Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425309
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom
Abstract
This paper describes the In-line Phase Shifter concept and presents some preliminary results of implementing a cost effective phase shifter utilizing electrostatic MEMs actuators.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Seong-Hwoon Kim, Jeff Dean, Leslie D. Kramer, "Low-cost in-line phase shifter (IPS) using electrostatic MEMS for large antenna arrays", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425309; https://doi.org/10.1117/12.425309
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