Micro stereo lithography for fabrication of 3D polymeric and ceramic MEMS

Vijay K. Varadan; Vasundara V. Varadan

doi:10.1117/12.425296

30 April 2001 Micro stereo lithography for fabrication of 3D polymeric and ceramic MEMS

Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425296
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

In this paper, the applications of Micro Stereo Lithography for polymer and ceramic based microstructures and MEMS are discussed with some examples.

Citation Download Citation

Vijay K. Varadan and Vasundara V. Varadan "Micro stereo lithography for fabrication of 3D polymeric and ceramic MEMS", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425296

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